Mems Built–in-self-test Using Mls Mems Built–in-self-test Using Mls

On-Chip Pseudorandom MEMS Testing

This paper presents a Built-In-Self-Test (BIST) implementation of pseudo-random testing for MEMS. The technique is based on Impulse Response (IR) evaluation using pseudo-random Maximum–Length Sequences (MLS). We will demonstrate the use of this technique for an on-chip fast and accurate broadband determination of MEMS behaviour, in particular for the characterisation of MEMS structures such as ...

A PLL based built-in self-test for MEMS sensors

Signature Analysis for Mems Pseudorandom Testing Using Neural Networks

The aim of this work is to develop a lowoverhead, low-cost built-in test for Micro Electro Mechanical Systems (MEMS). The proposed method relies on processing the Impulse Response (IR) through trained neural networks, in order to predict a set of MEMS performances, which are otherwise very expensive to measure using the conventional test approach. The use of neural networks allows us to employ ...

L . Rufer , S . Mir ,

This paper presents a method for an on-chip fast and accurate broadband determination of MEMS behaviour. This technique is based on impulse response (IR) evaluation using pseudo-random Maximum–Length Sequences (MLS). The MLS approach is capable of providing vastly superior dynamic range in comparison to the straightforward technique using an impulse excitation and is thus an optimal solution fo...

Electrically Induced Stimuli For MEMS Self-Test

A major problem for applying self-test techniques to MEMS is the multi-domain nature of the sensing parts that require special test equipment for stimuli generation. In this work we describe, for three different types of MEMS that work in different energy domains, how the required non-electrical test stimuli can be induced onchip by means of electrical signals. This provides the basis for addin...